JPH0458563B2 - - Google Patents

Info

Publication number
JPH0458563B2
JPH0458563B2 JP59134994A JP13499484A JPH0458563B2 JP H0458563 B2 JPH0458563 B2 JP H0458563B2 JP 59134994 A JP59134994 A JP 59134994A JP 13499484 A JP13499484 A JP 13499484A JP H0458563 B2 JPH0458563 B2 JP H0458563B2
Authority
JP
Japan
Prior art keywords
disk
gas
chamber
nozzle
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59134994A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6114521A (ja
Inventor
Dee Makumiran Junia Robaato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP13499484A priority Critical patent/JPS6114521A/ja
Publication of JPS6114521A publication Critical patent/JPS6114521A/ja
Publication of JPH0458563B2 publication Critical patent/JPH0458563B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP13499484A 1984-06-27 1984-06-27 ガス流量測定装置 Granted JPS6114521A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13499484A JPS6114521A (ja) 1984-06-27 1984-06-27 ガス流量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13499484A JPS6114521A (ja) 1984-06-27 1984-06-27 ガス流量測定装置

Publications (2)

Publication Number Publication Date
JPS6114521A JPS6114521A (ja) 1986-01-22
JPH0458563B2 true JPH0458563B2 (en]) 1992-09-17

Family

ID=15141452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13499484A Granted JPS6114521A (ja) 1984-06-27 1984-06-27 ガス流量測定装置

Country Status (1)

Country Link
JP (1) JPS6114521A (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6964890B1 (en) 1992-03-17 2005-11-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for forming the same
JPWO2004111579A1 (ja) * 2003-06-12 2006-09-28 学校法人日本大学 流量計

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5225667A (en) * 1975-08-22 1977-02-25 Sanfuremu Akiyumu Kk Flow meter
JPS5321957A (en) * 1976-08-12 1978-02-28 Koujirou Kashiwara Current meter for subterranean water
JPS5684714U (en]) * 1979-11-30 1981-07-08
JPS56151315A (en) * 1980-04-25 1981-11-24 Nippon Denso Co Ltd Flow rate detector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6964890B1 (en) 1992-03-17 2005-11-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for forming the same
US7564057B1 (en) 1992-03-17 2009-07-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having an aluminum nitride film
JPWO2004111579A1 (ja) * 2003-06-12 2006-09-28 学校法人日本大学 流量計

Also Published As

Publication number Publication date
JPS6114521A (ja) 1986-01-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term